Se Jin Ku, Gyeong Cheon Jo, Chang Hong Bak, Su Min Kim, Yu Ri Shin, Kwang Ho Kim, Se Hun Kwon and Jin-Baek Kim
Highly ordered freestanding TiO 2 nanotube arrays with atomic layer control of wall thickness were fabricated using an organic–inorganic hybrid nanoporous template and atomic layer deposition (ALD). The hybrid nanoporous template with a high-aspect-ratio cylindrical nanopore array can be readily fabricated by pattern transfer from a thin silicon-containing block copolymer film into a thick cross-linked organic polymer layer. The template exhibited excellent thermal stability and thus allowed the high-temperature ALD process to conformally deposit TiO 2 thin films on the inner surface of cylindrical nanopores. The ultrafine thickness tunability of the ALD process made it possible to develop TiO 2 nanotubes with various wall thicknesses. After the template was removed using a dry etch followed by calcination, vertically aligned and highly crystalline anatase TiO 2 nanotube arrays were produced without collapse or bundling. We also fabricated ...
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Highly ordered freestanding TiO 2 nanotube arrays with atomic layer control of wall thickness were fabricated using an organic–inorganic hybrid nanoporous template and atomic layer deposition (ALD). The hybrid nanoporous template with a high-aspect-ratio cylindrical nanopore array can be readily fabricated by pattern transfer from a thin silicon-containing block copolymer film into a thick cross-linked organic polymer layer. The template exhibited excellent thermal stability and thus allowed the high-temperature ALD process to conformally deposit TiO 2 thin films on the inner surface of cylindrical nanopores. The ultrafine thickness tunability of the ALD process made it possible to develop TiO 2 nanotubes with various wall thicknesses. After the template was removed using a dry etch followed by calcination, vertically aligned and highly crystalline anatase TiO 2 nanotube arrays were produced without collapse or bundling. We also fabricated ...
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