Thursday, July 03, 2014

Atomic Layer Deposition of MoS2 film

Nanoscale , 2014, Accepted Manuscript

DOI: 10.1039/C4NR02451F, Paper

Kian Ping Loh, Lee Kheng Tan, Bo Liu, Jinghua Teng, Shifeng Guo, Hong Yee Low

Mono- to multilayer thick MoS2 film has been grown by atomic layer deposition (ALD) technique at 300 [o]C on sapphire wafer. ALD provides precise control of MoS2 film thickness due...

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