Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films from a Zero-Valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium Complex and O2
Chemistry of Materials
DOI: 10.1021/cm5035485
Hyo Jun Jung, Jeong Hwan Han, Eun Ae Jung, Bo Keun Park, Jin-Ha Hwang, Seung Uk Son, Chang Gyoun Kim, Taek-Mo Chung and Ki-Seok An
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