Tuesday, December 02, 2014

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films from a Zero-Valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium Complex and O2

TOC Graphic


Chemistry of Materials

DOI: 10.1021/cm5035485




Hyo Jun Jung, Jeong Hwan Han, Eun Ae Jung, Bo Keun Park, Jin-Ha Hwang, Seung Uk Son, Chang Gyoun Kim, Taek-Mo Chung and Ki-Seok An

Click for full article

No comments:

Post a Comment