Large area high-speed metrology SPM system

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm 2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described. The first utilizes the low uncertainty interferometric sensors of the XYZ scanner while the second implements a genetic algorithm with multiple parameter fitting during the data merging step of the image stitching process. The basic uncertainty components related to these high-speed measurements are al...

P Klapetek, M Valtr, L Picco, O D Payton, J Martinek, A Yacoot and M Miles

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