Wednesday, March 18, 2015

Cooperation between adsorbates accounts for the activation of atomic layer deposition reactions




Nanoscale , 2015, Advance Article

DOI: 10.1039/C5NR00900F, Paper

Mahdi Shirazi, Simon D. Elliott

Adsorbed fragments can become reactive once sufficient numbers of molecules adsorb in their neighbourhood, which accelerates the crucial reaction steps in the deposition process.

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