Wednesday, March 25, 2015

Fabrication of Buckling Free Ultrathin Silicon Membranes by Direct Bonding with Thermal Difference

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ACS Nano

DOI: 10.1021/acsnano.5b00234




Florian Delachat, Christophe Constancias, Frank Fournel, Christophe Morales, Boris Le Drogoff, Mohamed Chaker and Joelle Margot

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