High-resolution and large-area nanoparticle arrays using EUV interference lithography

Nanoscale , 2015, 7,7386-7393

DOI: 10.1039/C5NR00565E, Paper

Waiz Karim, Simon Andreas Tschupp, Mehtap Oezaslan, Thomas J. Schmidt, Jens Gobrecht, Jeroen A. van Bokhoven, Yasin Ekinci

Step-and-repeat EUV-ATL to obtain large-area nanoparticle arrays.

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