Thursday, April 16, 2015

Role of hydrogen in the chemical vapor deposition growth of MoS2 atomic layers




Nanoscale , 2015, Advance Article

DOI: 10.1039/C5NR00904A, Paper

Xiao Li, Xinming Li, Xiaobei Zang, Miao Zhu, Yijia He, Kunlin Wang, Dan Xie, Hongwei Zhu

In the two-step chemical vapor deposition growth of MoS2 , hydrogen plays crucial roles as an inhibitor of the thermal-induced etching effect and as a promoter of desulfurization and oxidation of the obtained MoSx films.

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