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Wednesday, May 13, 2015
Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor
Chemistry of Materials
DOI: 10.1021/acs.chemmater.5b00255
Felix Mattelaer, Philippe M. Vereecken, Jolien Dendooven and Christophe Detavernier
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