Wednesday, July 22, 2015

A tunable sub-100 nm silicon nanopore array with an AAO membrane mask: reducing unwanted surface etching by introducing a PMMA interlayer

Nanoscale, 2015, Advance Article
DOI: 10.1039/C5NR02786A, Paper
Namsoo Lim, Yusin Pak, Jin Tae Kim, Youngkyu Hwang, Ryeri Lee, Yogeenth Kumaresan, NoSoung Myoung, Heung Cho Ko, Gun Young Jung
A PMMA interlayer dramatically reduces unwanted surface etching at the gap under the AAO membrane mask, resulting in a smooth silicon nanopore array (SiNPs) at sub-100 nm range.
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