Wednesday, August 19, 2015

Parallel Arrays of Sub-10 nm Aligned Germanium Nanofins from an In Situ Metal Oxide Hardmask using Directed Self-Assembly of Block Copolymers

TOC Graphic

Chemistry of Materials
DOI: 10.1021/acs.chemmater.5b02608

Cian Cummins, Anushka Gangnaik, Roisin A. Kelly, Alan J. Hydes, John O’Connell, Nikolay Petkov, Yordan M. Georgiev, Dipu Borah, Justin D. Holmes and Michael A. Morris
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