Tuesday, October 06, 2015

Multiphase Structure of Tantalum Oxynitride TaOxNy Thin Films Deposited by Reactive Magnetron Sputtering

TOC Graphic

The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.5b07373

Christine Taviot-Guého, Joël Cellier, Angélique Bousquet and Eric Tomasella
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