Atomic Layer Deposition of Dielectrics on Graphene Using Reversibly Physisorbed Ozone

Srikar Jandhyala, Greg Mordi, Bongki Lee, Geunsik Lee, Carlo Floresca, Pil-Ryung Cha, Jinho Ahn, Robert M. Wallace, Yves J. Chabal, Moon J. Kim, Luigi Colombo, Kyeongjae Cho and Jiyoung Kim Link to full article

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