In Situ Reaction Mechanism Studies on the New tBuN=M(NEt2)3 -Water and tBuN=M(NEt2)3 - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes

Yoann Tomczak, Kjell Knapas, Markku Sundberg, Markku Leskelä and Mikko Ritala Link to full article

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