Study on Initial Growth Behavior of RuO2 Film Grown by Pulsed Chemical Vapor Deposition: Effects of Substrate and Reactant Feeding Time

Jeong Hwan Han, Sang Woon Lee, Seong Keun Kim, Sora Han, Woongkyu Lee, Cheol Seong Hwang, Christian Dussarat and Julien Gatineau Link to full article

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