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B. H. Kim, S. M. Park, and S. W. Park et al.
As and P dopants in a plasma-doped Si-based fin structure were analyzed using atom probe tomography. The distributions and concentrations of As and P atoms in various regions of the fin structure and the oxidation levels for different dopants were determined. Most dopants were segregated at the fi ... [Appl. Phys. Lett. 101, 213113 (2012)] published Wed Nov 21, 2012.
Link to full article
B. H. Kim, S. M. Park, and S. W. Park et al.
As and P dopants in a plasma-doped Si-based fin structure were analyzed using atom probe tomography. The distributions and concentrations of As and P atoms in various regions of the fin structure and the oxidation levels for different dopants were determined. Most dopants were segregated at the fi ... [Appl. Phys. Lett. 101, 213113 (2012)] published Wed Nov 21, 2012.
Link to full article
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