Lateral resolution improvement in scanning nonlinear dielectric microscopy by measuring super-higher-order nonlinear dielectric constants

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N. Chinone, K. Yamasue, and Y. Hiranaga et al.

Scanning nonlinear dielectric microscopy (SNDM) can be used to visualize polarization distributions in ferroelectric materials and dopant profiles in semiconductor devices. Without using a special sharp tip, we achieved an improved lateral resolution in SNDM through the measurement of super-higher ... [Appl. Phys. Lett. 101, 213112 (2012)] published Wed Nov 21, 2012.



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