Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers

Jeong Hwan Han, Woongkyu Lee, Woojin Jeon, Sang Woon Lee, Cheol Seong Hwang, Changhee Ko and Julien Gatineau

Chemistry of Materials

DOI: 10.1021/cm302470k

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