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Monday, December 17, 2012

Three-dimensional micro electromechanical system piezoelectric ultrasound transducer

(author unknown)



Arman Hajati, Dimitre Latev, and Deane Gardner et al.

Here we present the design and experimental acoustic test data for an ultrasound transducer technology based on a combination of micromachined dome-shaped piezoelectric resonators arranged in a flexible architecture. Our high performance niobium-doped lead zirconate titanate film is implemented in ... [Appl. Phys. Lett. 101, 253101 (2012)] published Mon Dec 17, 2012.



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