Heteroepitaxy of La2O3 and La2–xYxO3 on GaAs (111)A by Atomic Layer Deposition: Achieving Low Interface Trap Density

Xinwei Wang, Lin Dong, Jingyun Zhang, Yiqun Liu, Peide D. Ye and Roy G. Gordon

Nano Letters

DOI: 10.1021/nl3041349

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