Growth Inhibitor To Homogenize Nucleation and Obtain Smooth HfB2 Thin Films by Chemical Vapor Deposition

S. Babar, N. Kumar, P. Zhang, J. R. Abelson, A. C. Dunbar, S. R. Daly and G. S. Girolami

Chemistry of Materials

DOI: 10.1021/cm303205u

Link to full article