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Thursday, March 21, 2013

The material dependence of temperature measurement resolution in thermal scanning electron microscopy

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Xiaowei Wu and Robert Hull

Thermal scanning electron microscopy is a recently developed temperature mapping technique based on thermal diffuse scattering in electron backscatter diffraction in a scanning electron microscope. It provides nano-scale and non-contact temperature mapping capabilities. Due to the specific tempera ... [Appl. Phys. Lett. 102, 113107 (2013)] published Thu Mar 21, 2013.



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