In Situ Reaction Mechanism Studies on Lithium Hexadimethyldisilazide and Ozone Atomic Layer Deposition Process for Lithium Silicate

The Journal of Physical Chemistry C

DOI: 10.1021/jp312309g

Yoann Tomczak, Kjell Knapas, Markku Sundberg, Markku Leskelä and Mikko Ritala

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