Huge increase in gas phase nanoparticle generation by pulsed direct current sputtering in a reactive gas admixture

Oleksandr Polonskyi, Tilo Peter, and Amir Mohammad Ahadi et al.

Using reactive DC sputtering in a gas aggregation cluster source, we show that pulsed discharge gives rise to a huge increase in deposition rate of nanoparticles by more than one order of magnitude compared to continuous operation. We suggest that this effect is caused by an equilibrium between sl ... [Appl. Phys. Lett. 103, 033118 (2013)] published Thu Jul 18, 2013.



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