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Tuesday, July 16, 2013

Low-damage high-throughput grazing-angle sputter deposition on graphene

C.-T. Chen, E. A. Casu, and M. Gajek et al.

Despite the prevalence of sputter deposition in the microelectronics industry, it has seen very limited applications for graphene electronics. In this letter, we report systematic investigation of the sputtering induced damages in graphene and identify the energetic sputtering gas neutrals as the ... [Appl. Phys. Lett. 103, 033109 (2013)] published Tue Jul 16, 2013.



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