Microwave reflectometry is proposed as an effective technique to detect the vibration of capacitively transduced microelectromechanical resonators. The transducer capacitor is probed by an incident wave, which is reflected being modulated by the time variations of the resonator displacement. Calcu ... [Appl. Phys. Lett. 103, 053124 (2013)] published Fri Aug 02, 2013.
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