Wednesday, September 11, 2013

Atomic Layer Deposition of Ruthenium on a Titanium Nitride Surface: A Density Functional Theory Study

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The Journal of Physical Chemistry C

DOI: 10.1021/jp405489w




Quan Manh Phung, Steven Vancoillie, Geoffrey Pourtois, Johan Swerts, Kristine Pierloot and Annelies Delabie

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