Fabrication of large-area 3D optical fishnet metamaterial by laser interference lithography

Y. Zhou, X. Y. Chen, and Y. H. Fu et al.

Centimeter-scale 3D fishnet metamaterial with negative refractive index in the near infrared spectral range is demonstrated. The large-area fabrication is realized using a conventional laser interference lithography technique in combination with a tri-layer lift-off procedure. This method allows u ... [Appl. Phys. Lett. 103, 123116 (2013)] published Fri Sep 20, 2013.



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