Interaction of Boron and Phosphorus Impurities in Silicon Nanowires during Low-Temperature Ozone Oxidation

The Journal of Physical Chemistry C

DOI: 10.1021/jp406713p

Naoki Fukata, Jun Kaminaga, Ryo Takiguchi, Riccardo Rurali, Mrinal Dutta and Kouichi Murakami

Click for full article