Electrochemical Monitoring of TiO2 Atomic Layer Deposition by Chronoamperometry and Scanning Electrochemical Microscopy

Chemistry of Materials

DOI: 10.1021/cm401635v

Ashis K. Satpati, Netzahualcóyotl Arroyo-Currás, Li Ji, Edward T. Yu and Allen J. Bard

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