Ultrasmooth, High Electron Mobility Amorphous In–Zn–O Films Grown by Atomic Layer Deposition

The Journal of Physical Chemistry C

DOI: 10.1021/jp409738f

Do-Joong Lee, Jang-Yeon Kwon, Jiyeon Kim, Ki-Ju Kim, Yeong-Ho Cho, Seong-Yong Cho, Soo-Hyun Kim, Jimmy Xu and Ki-Bum Kim

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