Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O

Chemistry of Materials

DOI: 10.1021/cm403390j

Jeong Hwan Han, Laura Nyns, Annelies Delabie, Alexis Franquet, Sven Van Elshocht and Christoph Adelmann

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