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Thursday, March 06, 2014

Surface Oxide Characterization and Interface Evolution in Atomic Layer Deposition of Al2O3 on InP(100) Studied by in Situ Infrared Spectroscopy

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The Journal of Physical Chemistry C

DOI: 10.1021/jp412455y




W. Cabrera, M. D. Halls, I. M. Povey and Y. J Chabal

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