Laser-Induced Sub-millisecond Heating Reveals Distinct Tertiary Ester Cleavage Reaction Pathways in a Photolithographic Resist Polymer

ACS Nano

DOI: 10.1021/nn500549w

Byungki Jung, Pratima Satish, David N. Bunck, William R. Dichtel, Christopher K. Ober and Michael O. Thompson

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