Atomic Layer Deposition and in Situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide

The Journal of Physical Chemistry C

DOI: 10.1021/jp509298r

Alexander C. Kozen, Alexander J. Pearse, Chuan-Fu Lin, Marshall A. Schroeder, Malachi Noked, Sang Bok Lee and Gary W. Rubloff

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