Flexible Single-Crystal Silicon Nanomembrane Photonic Crystal Cavity

ACS Nano

DOI: 10.1021/nn504393j

Xiaochuan Xu, Harish Subbaraman, Swapnajit Chakravarty, Amir Hosseini, John Covey, Yalin Yu, David Kwong, Yang Zhang, Wei-Cheng Lai, Yi Zou, Nanshu Lu and Ray T. Chen

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