Self-Limiting Layer-by-Layer Oxidation of Atomically Thin WSe2

Nano Letters

DOI: 10.1021/nl5049753

Mahito Yamamoto, Sudipta Dutta, Shinya Aikawa, Shu Nakaharai, Katsunori Wakabayashi, Michael S. Fuhrer, Keiji Ueno and Kazuhito Tsukagoshi

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