Fabrication of Buckling Free Ultrathin Silicon Membranes by Direct Bonding with Thermal Difference

ACS Nano

DOI: 10.1021/acsnano.5b00234

Florian Delachat, Christophe Constancias, Frank Fournel, Christophe Morales, Boris Le Drogoff, Mohamed Chaker and Joelle Margot

Click for full article