Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor

Chemistry of Materials

DOI: 10.1021/acs.chemmater.5b00255

Felix Mattelaer, Philippe M. Vereecken, Jolien Dendooven and Christophe Detavernier
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