Growth Enhancement and Nitrogen Loss in ZnOxNy Low-Temperature Atomic Layer Deposition with NH3

The Journal of Physical Chemistry C

DOI: 10.1021/acs.jpcc.5b06488

Soo Hyun Kim, Jung Joon Pyeon, Woo Chul Lee, Doo Seok Jeong, Seung-Hyub Baek, Jin-Sang Kim and Seong Keun Kim
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