Nanoscale, 2015, Accepted Manuscript
DOI: 10.1039/C5NR07334K, Communication
DOI: 10.1039/C5NR07334K, Communication
Li Li, Souvik Chakrabarty, Jing Jiang, Ben Zhang, Christopher Ober, Emmanuel P. Giannelis
Hf and Zr based hybrid nanoparticles with different surface organic ligands, the potential EUV resists for the industry-scaled fabrication of microelectronic devices, were prepared by sol-gel method. By comparing the...
The content of this RSS Feed (c) The Royal Society of Chemistry
Hf and Zr based hybrid nanoparticles with different surface organic ligands, the potential EUV resists for the industry-scaled fabrication of microelectronic devices, were prepared by sol-gel method. By comparing the...
The content of this RSS Feed (c) The Royal Society of Chemistry
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