Monday, June 22, 2020

[ASAP] Reduction of Carbon Impurities in Aluminum Nitride from Time-Resolved Chemical Vapor Deposition Using Trimethylaluminum

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The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.0c01724


from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/3es0OJ1
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