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Tuesday, December 08, 2020
[ASAP] Reaction Pathways for Atomic Layer Deposition with Lithium Hexamethyl Disilazide, Trimethyl Phosphate, and Oxygen Plasma
The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.0c09284
from The Journal of Physical Chemistry C: Latest Articles (ACS Publications) https://ift.tt/36VY9px
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