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Wednesday, February 06, 2013

GaN quantum-dots integrated in the gate dielectric of metal-oxide-semiconductor structures for charge-storage applications

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P. Dimitrakis, P. Normand, and C. Bonafos et al.

Gallium nitride quantum dots (QDs) were investigated as discrete charge storage nodes embedded in the gate dielectric of metal-oxide-semiconductor (MOS) capacitors. The GaN QDs were formed on top of 3.5 nm-thick SiO2/n-Si(001) substrates by radiofrequency plasma-assisted molecular beam deposition. ... [Appl. Phys. Lett. 102, 053117 (2013)] published Wed Feb 06, 2013.



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