Atomic Layer Deposition of BiFeO3 Thin Films Using β-Diketonates and H2O

The Journal of Physical Chemistry C

DOI: 10.1021/jp4080652

Feng Zhang, Guosheng Sun, Wanshun Zhao, Lei Wang, Liu Zheng, Shengbei Liu, Bin Liu, Lin Dong, Xingfang Liu, Guoguo Yan, Lixin Tian and Yiping Zeng

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