Conformal Formation of (GeTe2)(1–x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories

Taeyong Eom, Seol Choi, Byung Joon Choi, Min Hwan Lee, Taehong Gwon, Sang Ho Rha, Woongkyu Lee, Moo-Sung Kim, Manchao Xiao, Iain Buchanan, Deok-Yong Cho and Cheol Seong Hwang Link to full article

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