Cycloheptatrienyl-Cyclopentadienyl Heteroleptic Precursors for Atomic Layer Deposition of Group 4 Oxide Thin Films

Jaakko Niinistö, Timo Hatanpää, Maarit Kariniemi, Miia Mäntymäki, Leila Costelle, Kenichiro Mizohata, Kaupo Kukli, Mikko Ritala and Markku Leskelä Link to full article

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