Jae Kwan Kim, Hye Sung Cho, Ho-Sup Jung, Kipil Lim, Ki-Bum Kim, Dae-Geun Choi, Jun-Ho Jeong and Kahp-Yang Suh Link to full article | |||
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Thursday, May 17, 2012
Effect of surface tension and coefficient of thermal expansion in 30 nm scale nanoimprinting with two flexible polymer molds
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