Tuesday, July 29, 2014

Atomic layer deposition of a MoS2 film




Nanoscale , 2014, Advance Article

DOI: 10.1039/C4NR02451F, Paper

Lee Kheng Tan, Bo Liu, Jing Hua Teng, Shifeng Guo, Hong Yee Low, Kian Ping Loh

A mono- to multilayer thick MoS2 film has been grown by using the atomic layer deposition (ALD) technique on a sapphire wafer.

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