Friday, July 10, 2015

Large-scale freestanding nanometer-thick graphite pellicles for mass production of nanodevices beyond 10 nm

Nanoscale, 2015, Advance Article
DOI: 10.1039/C5NR03079J, Communication
Seul-Gi Kim, Dong-Wook Shin, Taesung Kim, Sooyoung Kim, Jung Hun Lee, Chang Gu Lee, Cheol-Woong Yang, Sungjoo Lee, Sang Jin Cho, Hwan Chul Jeon, Mun Ja Kim, Byung-Gook Kim, Ji-Beom Yoo
Freestanding nanometer-thick graphite film as a promising material for EUVL pellicle shows high thermal and chemical stability with excellent heat dissipation property.
To cite this article before page numbers are assigned, use the DOI form of citation above.
The content of this RSS Feed (c) The Royal Society of Chemistry


Click for full article

No comments:

Post a Comment